Influence of Magnetron Sputtered TiN and VN Coatings on the Electrical Impedance of Aluminium Electrodes

Authors

  • Georgi Kotlarski Institute of Electronics, Bulgarian Academy of Sciences
  • Nikolay Ivanov Institute of Electronics, Bulgarian Academy of Sciences
  • Dimitar Dechev Institute of Electronics, Bulgarian Academy of Sciences
  • Maria Ormanova Institute of Electronics, Bulgarian Academy of Sciences
  • Stefan Valkov Institute of Electronics, Bulgarian Academy of Sciences and Faculty of Mathematics, Informatics, and Natural Sciences, Technical University of Gabrovo, Bulgaria
  • Valentin Mateev Faculty of Electrical Engineering, Technical University of Sofia, Bulgaria
  • Iliana Marinova Faculty of Electrical Engineering, Technical University of Sofia, Bulgaria

DOI:

https://doi.org/10.7546/CRABS.2023.09.03

Keywords:

TiN, VN, electrical impedance, aluminium electrodes, magnetron sputtered

Abstract

In this work, TiN and VN coatings were applied on aluminium electrodes by direct current (DC) magnetron sputtering in order to study the influence of the protective coatings on the electrical impedance of the substrate. The structure of the samples was studied using X-ray diffraction (XRD). The microhardness of the substrate and the coated samples was also determined. The electrical impedance of the substrates with and without coatings was also studied and the results were used for evaluation of the applicability of such coatings for interface electrodes for flexible electronics. Electric impedance spectroscopy in a wide frequency range was applied for interlayer and surface contact properties determination. Results showed improved stability and conductivity of the electrodes coated using the TiN and VN thin films, particularly in the low frequency range.

Author Biographies

Georgi Kotlarski, Institute of Electronics, Bulgarian Academy of Sciences

Mailing Address:
Institute of Electronics,
Bulgarian Academy of Sciences
72 Tsarigradsko Shosse Blvd
1784 Sofia, Bulgaria

E-mail: gvkotlarski@gmail.com

Nikolay Ivanov, Institute of Electronics, Bulgarian Academy of Sciences

Mailing Address:
Institute of Electronics,
Bulgarian Academy of Sciences
72 Tsarigradsko Shosse Blvd
1784 Sofia, Bulgaria

E-mail: nick_ivanov_sl_@abv.bg

Dimitar Dechev, Institute of Electronics, Bulgarian Academy of Sciences

Mailing Address:
Institute of Electronics,
Bulgarian Academy of Sciences
72 Tsarigradsko Shosse Blvd
1784 Sofia, Bulgaria

E-mail: dadechev@abv.bg

Maria Ormanova, Institute of Electronics, Bulgarian Academy of Sciences

Mailing Address:
Institute of Electronics,
Bulgarian Academy of Sciences
72 Tsarigradsko Shosse Blvd
1784 Sofia, Bulgaria

E-mail: maria.ormanova87@gmail.com

Stefan Valkov, Institute of Electronics, Bulgarian Academy of Sciences and Faculty of Mathematics, Informatics, and Natural Sciences, Technical University of Gabrovo, Bulgaria

Mailing Address:
Institute of Electronics,
Bulgarian Academy of Sciences
72 Tsarigradsko Shosse Blvd
1784 Sofia, Bulgaria

and

Faculty of Mathematics, Informatics, and Natural Sciences,
Technical University of Gabrovo
4 Hadzhi Dimitar St
5300 Gabrovo, Bulgaria

E-mail: stsvalkov@gmail.com

Valentin Mateev, Faculty of Electrical Engineering, Technical University of Sofia, Bulgaria

Mailing Address:
Faculty of Electrical Engineering,
Technical University of Sofia
8 Kliment Ohridski Blvd
1756 Sofia, Bulgaria

E-mail: vmateev@tu-sofia.bg

Iliana Marinova, Faculty of Electrical Engineering, Technical University of Sofia, Bulgaria

Mailing Address:
Faculty of Electrical Engineering,
Technical University of Sofia
8 Kliment Ohridski Blvd
1756 Sofia, Bulgaria

E-mail: iliana@tu-sofia.bg

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Published

01-10-2023

How to Cite

[1]
G. Kotlarski, “Influence of Magnetron Sputtered TiN and VN Coatings on the Electrical Impedance of Aluminium Electrodes”, C. R. Acad. Bulg. Sci., vol. 76, no. 9, pp. 1335–1342, Oct. 2023.

Issue

Section

Physics